Collapse based integrated electrostatic active optical elements and method for manufacture thereof
A Standard patent application filed on 18 April 2002 credited to Al-Hemyari, Kadhair
;
Amirparviz, Babak
Details
Application number :
2002338462
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Collapse based integrated electrostatic active optical elements and method for manufacture thereof