Forming method and forming system for insulation film
A Standard patent application filed on 29 August 2002 credited to Murakawa, Shigemi ; Nakanishi, Toshio ; Kumai, Toshikazu

Details

Application number :

2002338198  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Forming method and forming system for insulation film  

Inventor :

Murakawa, Shigemi ; Nakanishi, Toshio ; Kumai, Toshikazu  

Agent name :

 

Address for service :

 

Filing date :

29 August 2002  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

Go