Line selected f¿2? two chamber laser system
A Standard patent application filed on 19 August 2002 credited to Ershov, Alexander I.
;
Brown, Daniel J. W.
;
Knowles, David S.
;
Myers, David W.
;
Onkels, Eckehard D.
;
Rylov, German E.
;
Partlo, William N.
;
Fomenkov, Igor V.
;
Ujazdowski, Richard C.
;
Sandstrom, Richard L.
;
Ness, Richard M.
Details
Application number :
2002336374
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Line selected f¿2? two chamber laser system
Inventor :
Ershov, Alexander I.
;
Brown, Daniel J. W.
;
Knowles, David S.
;
Myers, David W.
;
Onkels, Eckehard D.
;
Rylov, German E.
;
Partlo, William N.
;
Fomenkov, Igor V.
;
Ujazdowski, Richard C.
;
Sandstrom, Richard L.
;
Ness, Richard M.
Agent name :
Address for service :
Filing date :
19 August 2002
Associated companies :
Applicant name :
CYMER, INC
Applicant address :
16750 Via Del Campo Court, San Diego, CA 92127-1712