Details

Application number :
2002336374  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Line selected f¿2? two chamber laser system  
Inventor :
Ershov, Alexander I. ; Brown, Daniel J. W. ; Knowles, David S. ; Myers, David W. ; Onkels, Eckehard D. ; Rylov, German E. ; Partlo, William N. ; Fomenkov, Igor V. ; Ujazdowski, Richard C. ; Sandstrom, Richard L. ; Ness, Richard M.  
Agent name :
 
Address for service :
 
Filing date :
19 August 2002  
Associated companies :
 
Applicant name :
CYMER, INC  
Applicant address :
16750 Via Del Campo Court, San Diego, CA 92127-1712  
Old name :
 
Original Source :
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