Method for producing thin oxide or nitride layers
A Standard patent application filed on 21 August 2002 credited to Roos, Bjorn F. P. ; Hillebrands, Burkard ; Demokritov, Serguei O. ; Dahl, Roland ; Weiler, Manfred

Details

Application number :

2002333487  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for producing thin oxide or nitride layers  

Inventor :

Roos, Bjorn F. P. ; Hillebrands, Burkard ; Demokritov, Serguei O. ; Dahl, Roland ; Weiler, Manfred  

Agent name :

 

Address for service :

 

Filing date :

21 August 2002  

Associated companies :

 

Applicant name :

CCR GMBH BESCHICHTUNGS TECHNOLOGIE  

Applicant address :

Maarweg 30, 53619 Rheinbreitbach  

Old name :

 

Original Source :

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