Method and apparatus for forming low permittivity film and electronic device using the film
A Standard patent application filed on 10 September 2002 credited to Kusuhara, Masaki ; Sugino, Takashi ; Umeda, Masaru

Details

Application number :

2002332163  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for forming low permittivity film and electronic device using the film  

Inventor :

Kusuhara, Masaki ; Sugino, Takashi ; Umeda, Masaru  

Agent name :

 

Address for service :

 

Filing date :

10 September 2002  

Associated companies :

 

Applicant name :

SUGINO, Takashi  

Applicant address :

4-1-322, Kamishinden 3-chome, Toyonaka-shi, Osaka 560-0085  

Old name :

 

Original Source :

Go  

Same Inventor

• Electrode, electron emission element and device using it
• Apparatus for forming film