Micromachined device and method of forming the micromachined device
A Standard patent application filed on 11 January 2000 credited to Taylor, William P.
;
Steenberge, Robert W.
Details
Application number :
25023
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micromachined device and method of forming the micromachined device