Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate
A Standard patent application filed on 27 September 2002 credited to Kiihamaki, Jyrki

Details

Application number :

2002329292  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate  

Inventor :

Kiihamaki, Jyrki  

Agent name :

 

Address for service :

 

Filing date :

27 September 2002  

Associated companies :

 

Applicant name :

VALTION TEKNILLINEN TUTKIMUSKESKUS  

Applicant address :

Vuorimiehentie 5, FIN-02044 VTT  

Old name :

 

Original Source :

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