Silicon cluster superlattice, method for preparing silicon cluster superlattice, method for preparing silicon cluster, silicon cluster superlattice structure, method for preparing silicon cluster superlattice structure, semiconductor device and quantum de
A Standard patent application filed on 13 September 2002 credited to Kimura, Keisaku
;
Sato, Seiichi
;
Yamamoto, Naoki
Details
Application number :
2002328554
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Silicon cluster superlattice, method for preparing silicon cluster superlattice, method for preparing silicon cluster, silicon cluster superlattice structure, method for preparing silicon cluster superlattice structure, semiconductor device and quantum de