Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
A Standard patent application filed on 19 September 2002 credited to Pandelisev, Kiril A.
Details
Application number :
2002327648
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication