Details

Application number :
2002327139  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Mask replacement method and exposure device  
Inventor :
Kikuchi, Hidekazu ; Nishi, Kenji ; Ogura, Katsunobu  
Agent name :
 
Address for service :
 
Filing date :
20 August 2002  
Associated companies :
 
Applicant name :
SENDAI NIKON CORPORATION  
Applicant address :
277, Tako Aza Hara, Natori-shi, Miyagi 981-1221  
Old name :
 
Original Source :
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