Mask replacement method and exposure device
A Standard patent application filed on 20 August 2002 credited to Kikuchi, Hidekazu ; Nishi, Kenji ; Ogura, Katsunobu

Details

Application number :

2002327139  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Mask replacement method and exposure device  

Inventor :

Kikuchi, Hidekazu ; Nishi, Kenji ; Ogura, Katsunobu  

Agent name :

 

Address for service :

 

Filing date :

20 August 2002  

Associated companies :

 

Applicant name :

SENDAI NIKON CORPORATION  

Applicant address :

277, Tako Aza Hara, Natori-shi, Miyagi 981-1221  

Old name :

 

Original Source :

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