Polishing slurry comprising silica-coated ceria
A Standard patent application filed on 20 August 2002 credited to Lee, In Yeon
;
Kim, Kyoung Jun
;
Cho, Yun Ju
;
Kim, Sang Tae
;
Park, Sang Kyu
Details
Application number :
2002326175
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Polishing slurry comprising silica-coated ceria
Inventor :
Lee, In Yeon
;
Kim, Kyoung Jun
;
Cho, Yun Ju
;
Kim, Sang Tae
;
Park, Sang Kyu