High rep-rate laser with improved electrodes
A Standard patent application filed on 06 September 2002 credited to Ivaschenko, Alex P.
;
Moosman, Bryan
;
Rettig, Curtis L.
;
Ujazdowski, Richard C.
;
Gillespie, Walter D
;
Steiger, Thomas D.
;
Dyer, Timothy S.
;
Watson, Tom A.
;
Morton, Richard G.
Details
Application number :
2002324905
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
High rep-rate laser with improved electrodes
Inventor :
Ivaschenko, Alex P.
;
Moosman, Bryan
;
Rettig, Curtis L.
;
Ujazdowski, Richard C.
;
Gillespie, Walter D
;
Steiger, Thomas D.
;
Dyer, Timothy S.
;
Watson, Tom A.
;
Morton, Richard G.
Agent name :
Address for service :
Filing date :
06 September 2002
Associated companies :
Applicant name :
Cymer, Inc.
Applicant address :
Legal Department - M/S 4-2C
17075 Thornmint Court
San Diego, CA 92127-2413
United States of America