Six to ten khz, or greater gas discharge laser system
A Standard patent application filed on 16 August 2002 credited to Ivaschenko, Alex P.
;
Ershov, Alexander I.
;
Rettig, Curtis L.
;
Palenschat, Frederick A.
;
Melcher, Paul C.
;
Watson, Tom A.
;
Ness, Richard L.
;
Sandstrom, Richard L.
;
Shannon, Robert A.
;
Webb, Robert Kyle
;
Hofmann, Thomas
Details
Application number :
2002323175
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Six to ten khz, or greater gas discharge laser system
Inventor :
Ivaschenko, Alex P.
;
Ershov, Alexander I.
;
Rettig, Curtis L.
;
Palenschat, Frederick A.
;
Melcher, Paul C.
;
Watson, Tom A.
;
Ness, Richard L.
;
Sandstrom, Richard L.
;
Shannon, Robert A.
;
Webb, Robert Kyle
;
Hofmann, Thomas
Agent name :
Address for service :
Filing date :
16 August 2002
Associated companies :
Applicant name :
Cymer, Inc.
Applicant address :
Legal Department - M/S 4-2C
17075 Thornmint Court
San Diego, CA 92127-2413
United States of America