Process for manufacturing mems
A Standard patent application filed on 06 September 2002 credited to Hibert, Cyrille
;
Ionescu, Mihai Adrian
;
Pott, Vincent
;
Fritschi, Raphael
;
Fluckiger, Philippe
Details
Application number :
2002322966
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Process for manufacturing mems
Inventor :
Hibert, Cyrille
;
Ionescu, Mihai Adrian
;
Pott, Vincent
;
Fritschi, Raphael
;
Fluckiger, Philippe
Agent name :
Address for service :
Filing date :
06 September 2002
Associated companies :
Applicant name :
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Applicant address :
c/o Service des Relations Industrielles (SRI), CM-Ecublens, CH-1015 Lausanne