Methods for the production of components and ultra high vacuum cvd reactor
A Standard patent application filed on 28 August 2002 credited to Buschbeck, Hans Martin
;
Wiltsche, Siegfried
;
Bartholet, Philipp
;
Ramm, Jurgen
Details
Application number :
2002322956
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Methods for the production of components and ultra high vacuum cvd reactor
Inventor :
Buschbeck, Hans Martin
;
Wiltsche, Siegfried
;
Bartholet, Philipp
;
Ramm, Jurgen