Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing
A Standard patent application filed on 12 July 2002 credited to Chikarmane, Vinay
;
Tsang, Chi-Hwa
Details
Application number :
2002320506
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing
Inventor :
Chikarmane, Vinay
;
Tsang, Chi-Hwa
Agent name :
Address for service :
Filing date :
12 July 2002
Associated companies :
Applicant name :
INTEL CORPORATION
Applicant address :
2200 Mission College Boulevard, Santa Clara, CA 95052