Details
- Application number :
- 2002316672
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Wafer fabrication buffer station
- Inventor :
- Filipski, Paul S.
;
Bacchi, Paul
- Agent name :
-
- Address for service :
-
- Filing date :
- 12 July 2002
- Associated companies :
-
- Applicant name :
- NEWPORT CORPORATION
- Applicant address :
- 1791 Deere Avenue, Irvine, CA 92606
- Old name :
-
- Original Source :
- Go