Multistep laser processing of wafers supporting surface device layers
A Standard patent application filed on 28 June 2002 credited to O'Brien, James N.
;
Fahey, Kevin P.
;
Sun, Yunlong
;
Wolfe, Michael J.
;
Zou, Lian-Cheng
Details
Application number :
2002316481
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Multistep laser processing of wafers supporting surface device layers
Inventor :
O'Brien, James N.
;
Fahey, Kevin P.
;
Sun, Yunlong
;
Wolfe, Michael J.
;
Zou, Lian-Cheng
Agent name :
Address for service :
Filing date :
28 June 2002
Associated companies :
Applicant name :
ELECTRO SCIENTIFIC INDUSTRIES, INC.
Applicant address :
13900 NW Science Park Drive, Portland, OR 97229-5497