Details

Application number :
2002316260  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Feedforward and feedback control for conditioning of chemical mechanical polishing pad  
Inventor :
Paik, Young Joseph  
Agent name :
 
Address for service :
 
Filing date :
17 June 2002  
Associated companies :
 
Applicant name :
APPLIED MATERIALS, INC.  
Applicant address :
P.O. Box 450A, Santa Clara, CA 95052  
Old name :
 
Original Source :
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Same Inventor