Details
- Application number :
- 2002315750
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Coating device and coating method
- Inventor :
- Kurishima, Hiroaki
;
Ookura, Jun
;
Morikawa, Masateru
;
Ishizaka, Nobukazu
;
Minami, Tomohide
;
Sugimoto, Shinichi
;
Kobayashi, Shinji
;
Kitano, Takahiro
;
Koga, Norihisa
- Agent name :
-
- Address for service :
-
- Filing date :
- 01 July 2002
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481
- Old name :
-
- Original Source :
- Go