Method for fabricating polishing pad using laser beam and mask
A Standard patent application filed on 02 August 2002 credited to Park, Inha ; Kwon, Tae-Kyoung ; Kim, Jaeseok

Details

Application number :

2002313958  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for fabricating polishing pad using laser beam and mask  

Inventor :

Park, Inha ; Kwon, Tae-Kyoung ; Kim, Jaeseok  

Agent name :

 

Address for service :

 

Filing date :

02 August 2002  

Associated companies :

 

Applicant name :

SKC CO., LTD.  

Applicant address :

633, Jeongja-dong, Jangan-gu, Suwon-si, 440-300 Kyunggi-do  

Old name :

 

Original Source :

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