Inductively coupled plasma generator having lower aspect ratio
A Standard patent application filed on 26 July 2002 credited to Lee, Dong Seok ; Uhm, Sae Hoon ; Lee, Young Kwan ; Jung, Won Bong ; Lee, Sang Won

Details

Application number :

2002313941  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Inductively coupled plasma generator having lower aspect ratio  

Inventor :

Lee, Dong Seok ; Uhm, Sae Hoon ; Lee, Young Kwan ; Jung, Won Bong ; Lee, Sang Won  

Agent name :

 

Address for service :

 

Filing date :

26 July 2002  

Associated companies :

 

Applicant name :

PLASMART CO. LTD.  

Applicant address :

2326, School of Natural Science B/D, KAIST, 373-1 Kusong-dong, Yusong-gu, 305-701 Daejeon  

Old name :

 

Original Source :

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