Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools
A Standard patent application filed on 24 April 2002 credited to Johnson, Eric R. ; Slonaker, Steve ; Grodnensky, Ilya

Details

Application number :

2002309596  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools  

Inventor :

Johnson, Eric R. ; Slonaker, Steve ; Grodnensky, Ilya  

Agent name :

 

Address for service :

 

Filing date :

24 April 2002  

Associated companies :

 

Applicant name :

NIKON PRECISON, INC.  

Applicant address :

1399 Shoreway Road, Belmont, CA 94002-4107  

Old name :

 

Original Source :

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