Apparatus for automatically measuring the resistivity of semiconductor boules using the method of four probes
A Standard patent application filed on 03 May 2002 credited to Cartier, Carl ; Darling, David ; Chandra, Mohan ; Roman, L. Dolan ; Burgess, Glen Alan

Details

Application number :

2002308611  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for automatically measuring the resistivity of semiconductor boules using the method of four probes  

Inventor :

Cartier, Carl ; Darling, David ; Chandra, Mohan ; Roman, L. Dolan ; Burgess, Glen Alan  

Agent name :

 

Address for service :

 

Filing date :

03 May 2002  

Associated companies :

 

Applicant name :

G.T. EQUIPMENT TECHNOLOGIES, INC.  

Applicant address :

472 Amherst Street, Nashua, NH 03063  

Old name :

 

Original Source :

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