Gas discharge laser with improved beam path
A Standard patent application filed on 17 April 2002 credited to Ivaschenko, Alex P.
;
Glatzel, Holger K.
;
Howey, James K.
;
Melchior, John T.
;
Partlo, William N.
;
Cybulski, Ray F.
;
Sandstrom, Richard L.
;
Hulburd, William
;
Newman, Peter C.
Details
Application number :
2002307391
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Gas discharge laser with improved beam path
Inventor :
Ivaschenko, Alex P.
;
Glatzel, Holger K.
;
Howey, James K.
;
Melchior, John T.
;
Partlo, William N.
;
Cybulski, Ray F.
;
Sandstrom, Richard L.
;
Hulburd, William
;
Newman, Peter C.
Agent name :
Address for service :
Filing date :
17 April 2002
Associated companies :
Applicant name :
CYMER, INC.
Applicant address :
16750 Via Del Campo Court, San Diego, CA 92127-1712