A method for semiconductor device fabrication
A Standard patent application filed on 04 April 2002 credited to Antoniadis, Dimitri A. ; Cheng, Zhiyuan ; Fitzgerald, Eugene A.

Details

Application number :
2002307067  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
A method for semiconductor device fabrication  
Inventor :
Antoniadis, Dimitri A. ; Cheng, Zhiyuan ; Fitzgerald, Eugene A.  
Agent name :
 
Address for service :
 
Filing date :
04 April 2002  
Associated companies :
 
Applicant name :
MASSACHUSETTS INSTITUTE OF TECHNOLOGY  
Applicant address :
77 Massachusetts Avenue, Cambridge, MA 02139  
Old name :
 
Original Source :
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