Method and apparatus for providing electrical and fluid communication to a rotation microelectronic workpiece during electrochemical processing
A Standard patent application filed on 28 February 2002 credited to Pederson, John M. ; Erickson, James J.

Details

Application number :

2002306632  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for providing electrical and fluid communication to a rotation microelectronic workpiece during electrochemical processing  

Inventor :

Pederson, John M. ; Erickson, James J.  

Agent name :

 

Address for service :

 

Filing date :

28 February 2002  

Associated companies :

 

Applicant name :

SEMITOOL, INC.  

Applicant address :

655 West Reserve Drive, Kalispell, MT 59901  

Old name :

 

Original Source :

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