Patterning compositions using e-beam lithography and structures and devices made thereby
A Standard patent application filed on 07 June 2002 credited to Lavallee, Guy P. ; Lee, Youngchul ; Catchmark, Jeffrey M.

Details

Application number :

2002305893  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Patterning compositions using e-beam lithography and structures and devices made thereby  

Inventor :

Lavallee, Guy P. ; Lee, Youngchul ; Catchmark, Jeffrey M.  

Agent name :

 

Address for service :

 

Filing date :

07 June 2002  

Associated companies :

 

Applicant name :

THE PENN STATE RESEARCH FOUNDATION  

Applicant address :

304 Old Main, University Park, PA 16802  

Old name :

 

Original Source :

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