Membrane for micro-electro-mechanical switch, and methods of making and using it
A Standard patent application filed on 14 May 2002 credited to Pillans, Brandon W.
;
Yao, Zhimin Jamie
;
Chen, Shea (Nmi)
;
Ehmke, John C.
Details
Application number :
2002305598
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Membrane for micro-electro-mechanical switch, and methods of making and using it
Inventor :
Pillans, Brandon W.
;
Yao, Zhimin Jamie
;
Chen, Shea (Nmi)
;
Ehmke, John C.