Systems and methods for epitaxially depositing films
A Standard patent application filed on 12 April 2002 credited to Messineo, Daniel L. ; Sallows, David E. ; Mailho, Robert D. ; Johnsgard, Mark W. ; Johnsgard, Kristain E.

Details

Application number :

2002303333  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Systems and methods for epitaxially depositing films  

Inventor :

Messineo, Daniel L. ; Sallows, David E. ; Mailho, Robert D. ; Johnsgard, Mark W. ; Johnsgard, Kristain E.  

Agent name :

 

Address for service :

 

Filing date :

12 April 2002  

Associated companies :

 

Applicant name :

MATTSON TECHNOLOGY, INC.  

Applicant address :

2800 Bayview Drive, Fremont, CA 94538  

Old name :

 

Original Source :

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