Device for loading and unloading silicon wafers in an oven from a multiple-cassette station
A Standard patent application filed on 14 May 2002 credited to Pellegrin, Yvon ; Giral, Claude

Details

Application number :

2002302725  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Device for loading and unloading silicon wafers in an oven from a multiple-cassette station  

Inventor :

Pellegrin, Yvon ; Giral, Claude  

Agent name :

 

Address for service :

 

Filing date :

14 May 2002  

Associated companies :

 

Applicant name :

SEMCO ENGINEERING S.A.  

Applicant address :

625, rue de la Croix Verte, Parc Euromedecine, F-34196 Montpellier cedex 5  

Old name :

 

Original Source :

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