Apparatus and method for point-of-use treatment of effluent gas streams
A Standard patent application filed on 15 December 1999 credited to Arno, Jose I. ; Holst, Mark R ; Deseve, Jason ; Sweeney, Joseph D. ; Lorelli, Jeff ; Yee, Sam

Details

Application number :

21889  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for point-of-use treatment of effluent gas streams  

Inventor :

Arno, Jose I. ; Holst, Mark R ; Deseve, Jason ; Sweeney, Joseph D. ; Lorelli, Jeff ; Yee, Sam  

Agent name :

 

Address for service :

 

Filing date :

15 December 1999  

Associated companies :

 

Applicant name :

Advanced Technology Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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