Optical microswitch with rotary electrostatic microactuator
A Standard patent application filed on 15 December 1999 credited to Jerman, John H
;
Heanue, John F.
Details
Application number :
21837
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Optical microswitch with rotary electrostatic microactuator