Method for making a microstructure by surface micromachining
A Standard patent application filed on 22 April 2002 credited to Rodgers, M. Steven
;
Sniegowski, Jeffry J.
Details
Application number :
2002257193
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for making a microstructure by surface micromachining
Inventor :
Rodgers, M. Steven
;
Sniegowski, Jeffry J.
Agent name :
Address for service :
Filing date :
22 April 2002
Associated companies :
Applicant name :
MEMX, INC.
Applicant address :
5600 Wyoming Boulevard, NE, Suite 20, Albuquerque, NM 87109