Light source device and light irradiation device, and device manufacturing method
A Standard patent application filed on 20 May 2002 credited to Owa, Soichi
;
Tokuhisa, Akira
Details
Application number :
2002256902
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Light source device and light irradiation device, and device manufacturing method
Inventor :
Owa, Soichi
;
Tokuhisa, Akira
Agent name :
Address for service :
Filing date :
20 May 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331