Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
A Standard patent application filed on 23 April 2002 credited to Steger, Robert ; Benjamin, Neil

Details

Application number :

2002254708  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support  

Inventor :

Steger, Robert ; Benjamin, Neil  

Agent name :

 

Address for service :

 

Filing date :

23 April 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH, CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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