Method for producing titania-doped fused silica extreme ultraviolet lithography substrates glass
A Standard patent application filed on 25 March 2002 credited to Ackerman, Bradford G ; Yu, Chunzhe C ; Russo, Nikki J ; Moore, Lisa A ; Hrdina, Kenneth E

Details

Application number :

2002254407  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for producing titania-doped fused silica extreme ultraviolet lithography substrates glass  

Inventor :

Ackerman, Bradford G ; Yu, Chunzhe C ; Russo, Nikki J ; Moore, Lisa A ; Hrdina, Kenneth E  

Agent name :

 

Address for service :

 

Filing date :

25 March 2002  

Associated companies :

 

Applicant name :

CORNING INCORPORATED  

Applicant address :

1 Riverfront Plaza, Corning, NY 14831  

Old name :

 

Original Source :

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