Fabrication of a microelectromechanical system (mems) device cross-reference to related applications
A Standard patent application filed on 20 February 2002 credited to Lucak, Mark A.
;
Kretschmann, Robert J.
;
Harris, Richard D.
;
Knieser, Michael J.
Details
Application number :
2002253972
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Fabrication of a microelectromechanical system (mems) device cross-reference to related applications
Inventor :
Lucak, Mark A.
;
Kretschmann, Robert J.
;
Harris, Richard D.
;
Knieser, Michael J.
Agent name :
Address for service :
Filing date :
20 February 2002
Associated companies :
Applicant name :
ROCKWELL AUTOMATION TECHNOLOGIES, INC.
Applicant address :
One Allen Bradley Drive, Mayfield heights, OH 44124