Details
- Application number :
- 2002253902
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Chemical-mechanical planarization using ozone
- Inventor :
- Shang, Xiaowei
;
Small, Robert J.
- Agent name :
-
- Address for service :
-
- Filing date :
- 08 February 2002
- Associated companies :
-
- Applicant name :
- EKC TECHNOLOGY, INC.
- Applicant address :
- 2520 Barrington Court, Hayward, CA 94545-1163
- Old name :
-
- Original Source :
- Go