Polarization vector alignment for interference lithography patterning
A Standard patent application filed on 27 February 2002 credited to Kelsey, Adam F. ; Leclerc, Mark A. ; Macleod, Bruce D.

Details

Application number :

2002252136  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Polarization vector alignment for interference lithography patterning  

Inventor :

Kelsey, Adam F. ; Leclerc, Mark A. ; Macleod, Bruce D.  

Agent name :

 

Address for service :

 

Filing date :

27 February 2002  

Associated companies :

 

Applicant name :

OPTICAL SWITCH CORPORATION  

Applicant address :

930 E. Campbell Road, Richardson, TX 75081  

Old name :

 

Original Source :

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