Novel polymers, processes for polymer synthesis and photoresist compositions
A Standard patent application filed on 26 February 2002 credited to Barclay, George G.
;
Caporale, Stefan J.
;
Kavanagh, Robert J.
;
Pugliano, Nicholas
Details
Application number :
2002250176
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Novel polymers, processes for polymer synthesis and photoresist compositions
Inventor :
Barclay, George G.
;
Caporale, Stefan J.
;
Kavanagh, Robert J.
;
Pugliano, Nicholas