Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
A Standard patent application filed on 14 March 2002 credited to Vitcak, Daniel R.
;
Behr, Frederick E.
;
Owens, John G.
;
Kesari, Susrut
;
Flynn, Richard M.
;
Minday, Richard M.
;
Costello, Michael G.
Details
Application number :
2002248603
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
Inventor :
Vitcak, Daniel R.
;
Behr, Frederick E.
;
Owens, John G.
;
Kesari, Susrut
;
Flynn, Richard M.
;
Minday, Richard M.
;
Costello, Michael G.
Agent name :
Address for service :
Filing date :
14 March 2002
Associated companies :
Applicant name :
3M INNOVATIVE PROPERTIES COMPANY
Applicant address :
3M Center, Post Office Box 33427, Saint Paul, MN 55133-3427