Details
- Application number :
- 2002246888
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Wafer support for chemical mechanical planarization
- Inventor :
- Halley, David G.
- Agent name :
-
- Address for service :
-
- Filing date :
- 23 October 2001
- Associated companies :
-
- Applicant name :
- STRASBAUGH
- Applicant address :
- 825 Buckley Road, San Luis Obispo, CA 93401
- Old name :
-
- Original Source :
- Go