Magnetic field furnace and a method of using the same to manufacture semiconductor substrates
A Standard patent application filed on 28 December 2001 credited to Isozaki, Hideyuki ; Fujita, Kentaro ; Maishigi, Keiji ; Glavish, Hilton, F.

Details

Application number :

2002246865  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Magnetic field furnace and a method of using the same to manufacture semiconductor substrates  

Inventor :

Isozaki, Hideyuki ; Fujita, Kentaro ; Maishigi, Keiji ; Glavish, Hilton, F.  

Agent name :

Madderns Patent & Trade Mark Attorneys  

Address for service :

GPO Box 2752 Adelaide SA 5001 Australia  

Filing date :

28 December 2001  

Associated companies :

 

Applicant name :

Ebara Corporation  

Applicant address :

11-1 Haneda Asahi-cho Ohta-ku Tokyo 144-8510 Japan  

Old name :

Ebara Solar, Inc.  

Original Source :

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