Method for providing optical quality silicon surface
A Standard patent application filed on 01 February 2002 credited to Naydenkov, Mikhail N. ; Yegnanarayanan, Sivasubramaniam ; Huynh, Quyen

Details

Application number :

2002243719  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for providing optical quality silicon surface  

Inventor :

Naydenkov, Mikhail N. ; Yegnanarayanan, Sivasubramaniam ; Huynh, Quyen  

Agent name :

 

Address for service :

 

Filing date :

01 February 2002  

Associated companies :

 

Applicant name :

INTEL CORPORATION  

Applicant address :

2200 Mission College Boulevard, Santa Clara, CA 95054  

Old name :

 

Original Source :

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