Purge monitoring system for gas discharge laser
A Standard patent application filed on 14 January 2002 credited to Fullen, Darrell W.
;
Van Doorn, John
;
Clopton, William H.
;
Rokni, Shahryar
;
Newman, Peter C.
Details
Application number :
2002243530
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Purge monitoring system for gas discharge laser
Inventor :
Fullen, Darrell W.
;
Van Doorn, John
;
Clopton, William H.
;
Rokni, Shahryar
;
Newman, Peter C.
Agent name :
Address for service :
Filing date :
14 January 2002
Associated companies :
Applicant name :
CYMER, INC.
Applicant address :
Legal Department - M/S 1-2A, 16750 Via Del Campo Court, San Diego, CA 92127-1712