Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions
A Standard patent application filed on 19 December 2001 credited to Morris, Arthur S. Iii
;
Cunningham, Shawn J.
;
Dereus, Dana R.
Details
Application number :
2002241666
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions
Inventor :
Morris, Arthur S. Iii
;
Cunningham, Shawn J.
;
Dereus, Dana R.