Details

Application number :
2002238129  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Electron beam system using multiple electron beams  
Inventor :
Tesch, Paul P. ; Skoczylas, Walter ; Gerlach, Robert L.  
Agent name :
 
Address for service :
 
Filing date :
23 February 2002  
Associated companies :
 
Applicant name :
FEI COMPANY  
Applicant address :
7451 NW Evergreen Parkway, Hillsboro, OR 97124-5830  
Old name :
 
Original Source :
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