Electron beam system using multiple electron beams
A Standard patent application filed on 23 February 2002 credited to Tesch, Paul P.
;
Skoczylas, Walter
;
Gerlach, Robert L.
Details
Application number :
2002238129
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Electron beam system using multiple electron beams
Inventor :
Tesch, Paul P.
;
Skoczylas, Walter
;
Gerlach, Robert L.
Agent name :
Address for service :
Filing date :
23 February 2002
Associated companies :
Applicant name :
FEI COMPANY
Applicant address :
7451 NW Evergreen Parkway, Hillsboro, OR 97124-5830