Alternating current rotatable sputter cathode
A Standard patent application filed on 08 November 2001 credited to Meinke, Brian P. ; Peterson, Roger L. ; German, John R. ; Crowley, Daniel T.

Details

Application number :

2002230639  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Alternating current rotatable sputter cathode  

Inventor :

Meinke, Brian P. ; Peterson, Roger L. ; German, John R. ; Crowley, Daniel T.  

Agent name :

 

Address for service :

 

Filing date :

08 November 2001  

Associated companies :

 

Applicant name :

Viratec Thin Films, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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