Details
- Application number :
- 2002230535
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Mems device with integral packaging
- Inventor :
- Cohn, Michael B.
;
Xu, Ji-Hai
- Agent name :
-
- Address for service :
-
- Filing date :
- 29 November 2001
- Associated companies :
-
- Applicant name :
- Microassembly Technologies, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go